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Shanghai Pudan Optical Instrument Co., Ltd

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    33489331qq.com

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    13918157955

  • Address

    16th Floor, Kaihe Sunshine Plaza, No. 3003 Baoyang Road, Baoshan District, Shanghai

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MX-4 Semiconductor Inspection Microscope

NegotiableUpdate on 05/25
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Overview

MX-4 Semiconductor Inspection Microscope

Product Details

application

MX-4Semiconductor inspection microscopeAdopting an infinite chromatic aberration correction optical system, it has the characteristics of a large field of view, high imaging quality, strong functional scalability (bright field/oblique illumination/polarized light/DIC observation), and a large platform; Equipped with a long working distance semi apochromatic objective lens and a large stroke stage that can move quickly and slowly, it is particularly suitable for the inspection of semiconductor masks, liquid crystal substrates, other flat displays, and various industrial devices.

Product Features

ØSafe and stable rack structure design:The industrial inspection grade microscope body, low center of gravity, high rigidity, and high stability metal frame ensure the seismic resistance and imaging stability of the system. Its front low hand position coarse fine adjustment coaxial focusing mechanism, built-in100-240VWide voltage transformers can adapt to the voltage of power grids in different regions. The base is designed with a wind circulation cooling system inside, which will not cause the rack to overheat even after long-term use

ØReflective Illuminator:Single high-power unit5WwhiteLEDLighting with oblique lighting mechanism. When switching to oblique lighting, different material parts on the surface of the object can present three-dimensional patterns, increasing the contrast and visual effect of observation

ØHigh performance objective lens converter:The MX4R converter adopts precision bearing design, with a light and comfortable rotating feel, high repeatability positioning accuracy, and good control of the concentricity of the objective lens after conversion. Different hole positions of the converter can be configured according to requirements

Product specifications

Specification parameters MX-4
Optical path system Infinite chromatic aberration correction optical system
viewing head Three way observation tube with hinge, tilted at 30 ° and rotated at 360 °; Pupil distance range: 50mm~75mm
Just like, visual acuity adjustment ± 5 °; Two levels of spectral ratio R: T=100:0 or 50:50
eyepiece High eye point, large field of view, flat field eyepiece WF10X (Φ 2)2mm)
Infinite Long Working Distance Field Elimination
Chromatic aberration metallographic objective lens
Magnification Numerical aperture (N.A.) Working distance (W.D.)
-DIC 0.15 10.80mm
10×-DIC 0.3 12.20mm
20×-DIC 0.45 4.00mm
Infinite long working distance flat field semi destructive metallographic objective lens 50× 0.55 7.90mm
100 x (optional) 0.8 2.10mm
magnification 50×-500×
Objective Wheel (DIC) Internal positioning 5-hole converter (with DIC slot)
stage 6-inch three-layer mechanical mobile platform, low hand position X and Y direction coaxial adjustment
Platform area 445mmX240mm, reflective lighting movement range: 158mmX158mm; Transmitting illumination movement range: 100mm x 100mm, with clutch handle, can be used for rapid movement throughout the full range of travel
Glass loading platform. (for transmission/reflection)
Focuser Coarse and micro coaxial low position focusing mechanism with locking and limiting devices
Micro grid value 0.001mm、 Rough adjustment of travel30mm
DIC differential interference DIC differential interference observation component(Optional)
Simple polarizing device φ 30 polarizer insert board (for reflection), 360Rotating polarizer insert board (for reflection)
Reflective lighting system Kola lighting system with field stop and aperture stop, adjustable center
Equipped with oblique illumination device
100-240V wide voltage, single high-power 5W LED, warm color
Transmissive lighting system Built in 5W warm color LED transmission lighting system, with independent control of upper and lower lighting
Digital imaging system High quality 0.5X CCD adaptive lens
Puda 6.3 million USB imported chip digital microscope camera (using SONY)
6.3M/IMX178(C),1/1.8“ (7.37x4.92), 59@3072 x2048, 59@1536x 1024 high-performance chipset/ USB 3.0 high-speed communication, high resolution, perfect color reproduction processing/Ultra Fine patented color rendering technology)ToupView is a professional imaging software Upgradeable accessories
Eyepiece:
10 x (divided)

Note: ● is standard, ○ is an upgradable accessory

Special statement:·

The above content is subject to change without prior notice.·Pudan will do its best to provide you with accurate and comprehensive information, but will not be held responsible for any errors or omissions that may occur in the information.